Improving Ge-rich GST ePCM reliability through BEOL engineering

Authors :: Redaelli, A.
Gandolfo, A.
Samanni, G.
Gomiero, E.
Petroni, E.
Scotti, L.
Lippiello, A.
Mattavelli, P.
Jasse, J.
Codegoni, D.
Serafini, A.
Ranica, R.
Boccaccio, C.
Sandrini, J.
Berthelon, R.
Grenier, Jc.
Weber, O.
Turgis, D.
Valery, A.
Del Medico, S.
Caubet, V.
Reynard, Jp.
Dutartre, D.
Favennec, L.
Conte, A.
Disegni, F.
De Tomasi, M.
Ventre, A.
Baldo, M.
Ielmini, D.
Maurelli, A.
Ferreira, P.
Arnaud, F.
Piazza, F.
Cappelletti, P.
Annunziata, R.
Gonella, R.
Source :: ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC).
Publication Year :: 2021
Publisher :: IEEE, 2021.

Database :: OpenAIRE
Journal :: ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC)
Accession number :: edsair.doi.dedup.....cfabade9efe81f8f1ff17cb85203183a

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