A facile synthesis of fluorinated alkoxytrimethylsilanes using 1-methylimidazole as an acid scavenger

Fluorinated alkoxytrimethylsilanes (RfCH2OSiMe3), potential candidates for the third-generation cleaning agents, were synthesized in high yields over 95% from the reaction of chlorotrimethylsilane and fluorinated alcohol (RfCH2OH) in the presence of 1-methylimidazole. Elemental and 1H NMR spectroscopic analysis showed that the reaction proceeds through the formation of an intermediate, 3-methyl-1-trimethylsilylimidazolium chloride.