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EL2 distribution in LEC GaAs ingots and wafers

Authors :
B. Gouteraux
N. Visentin
M. Bonnet
Thomson-CSF Laboratoire Central de Recherches (THOMSON-CSF LCR)
Thomson
Source :
Revue de Physique Appliquée, Revue de Physique Appliquée, Société française de physique / EDP, 1988, 23 (5), pp.739-746. ⟨10.1051/rphysap:01988002305073900⟩
Publication Year :
1988
Publisher :
HAL CCSD, 1988.

Abstract

A combination of electrical and optical mapping experiments has been used to obtain the EL2 distribution patterns in semi-insulating GaAs wafers. The influence of growing conditions such as stoichiometry, mass fraction solidified and moisture in the encapsulant is shown in terms of EL2 uniformity and residual doping level.

Details

Language :
English
ISSN :
00351687 and 27773671
Database :
OpenAIRE
Journal :
Revue de Physique Appliquée, Revue de Physique Appliquée, Société française de physique / EDP, 1988, 23 (5), pp.739-746. ⟨10.1051/rphysap:01988002305073900⟩
Accession number :
edsair.doi.dedup.....c9d7195a713a07107324d6c6128dae09
Full Text :
https://doi.org/10.1051/rphysap:01988002305073900⟩