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Sub-pixel response of double-SOI pixel sensors for X-ray astronomy
- Source :
- Journal of Instrumentation. 14:C10023-C10023
- Publication Year :
- 2019
- Publisher :
- IOP Publishing, 2019.
-
Abstract
- We have been developing the X-ray silicon-on-insulator (SOI) pixel sensor called XRPIX for future astrophysical satellites. XRPIX is a monolithic active pixel sensor consisting of a high-resistivity Si sensor, thin SiO$_2$ insulator, and CMOS pixel circuits that utilize SOI technology. Since XRPIX is capable of event-driven readouts, it can achieve high timing resolution greater than $\sim 10{\rm ~\mu s}$, which enables low background observation by adopting the anti-coincidence technique. One of the major issues in the development of XRPIX is the electrical interference between the sensor layer and circuit layer, which causes nonuniform detection efficiency at the pixel boundaries. In order to reduce the interference, we introduce a Double-SOI (D-SOI) structure, in which a thin Si layer (middle Si) is added to the insulator layer of the SOI structure. In this structure, the middle Si layer works as an electrical shield to decouple the sensor layer and circuit layer. We measured the detector response of the XRPIX with D-SOI structure at KEK. We irradiated the X-ray beam collimated with $4{\rm ~\mu m\phi}$ pinhole, and scanned the device with $6{\rm ~\mu m}$ pitch, which is 1/6 of the pixel size. In this paper, we present the improvement in the uniformity of the detection efficiency in D-SOI sensors, and discuss the detailed X-ray response and its physical origins.<br />Comment: 12 pages, 9 figures, accepted for publication in Journal of Instrumentation
- Subjects :
- CMOS sensor
Materials science
Pixel
010308 nuclear & particles physics
business.industry
Detector
X-ray detector
FOS: Physical sciences
Silicon on insulator
01 natural sciences
Collimated light
030218 nuclear medicine & medical imaging
03 medical and health sciences
0302 clinical medicine
CMOS
0103 physical sciences
Optoelectronics
Astrophysics - Instrumentation and Methods for Astrophysics
business
Instrumentation and Methods for Astrophysics (astro-ph.IM)
Instrumentation
Mathematical Physics
Electronic circuit
Subjects
Details
- ISSN :
- 17480221
- Volume :
- 14
- Database :
- OpenAIRE
- Journal :
- Journal of Instrumentation
- Accession number :
- edsair.doi.dedup.....c98e22fcf2c9ec8b5b16efa095201c43