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Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform
- Source :
- Photonics Research, Photonics Research, OSA Publishing, 2020, 8 (3), pp.352-358. ⟨10.1364/PRJ.379555⟩
- Publication Year :
- 2020
- Publisher :
- HAL CCSD, 2020.
-
Abstract
- International audience; We report supercontinuum generation in nitrogen-rich (N-rich) silicon nitride waveguides fabricated through back-end complementary-metal-oxide-semiconductor (CMOS)-compatible processes on a 300 mm platform. By pumping in the anomalous dispersion regime at a wavelength of 1200 nm, two-octave spanning spectra covering the visible and near-infrared ranges, including the O band, were obtained. Numerical calculations showed that the nonlinear index of N-rich silicon nitride is within the same order of magnitude as that of stoichiometric silicon nitride, despite the lower silicon content. N-rich silicon nitride then appears to be a promising candidate for nonlinear devices compatible with back-end CMOS processes.
- Subjects :
- Materials science
Silicon
business.industry
chemistry.chemical_element
Nonlinear optics
02 engineering and technology
Chemical vapor deposition
021001 nanoscience & nanotechnology
7. Clean energy
01 natural sciences
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
Supercontinuum
010309 optics
Wavelength
chemistry.chemical_compound
CMOS
Silicon nitride
chemistry
0103 physical sciences
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Optoelectronics
0210 nano-technology
business
Photonic-crystal fiber
Subjects
Details
- Language :
- English
- ISSN :
- 23279125
- Database :
- OpenAIRE
- Journal :
- Photonics Research, Photonics Research, OSA Publishing, 2020, 8 (3), pp.352-358. ⟨10.1364/PRJ.379555⟩
- Accession number :
- edsair.doi.dedup.....c95cf26c3aff7fcea940596462b4c899