A fast synthesis route of boron–carbon–nitrogen ultrathin layers towards highly mixed ternary B–C–N phases

We report a direct and fast synthesis route to grow boron-carbon-nitrogen layers based on microwave-assisted plasma enhanced chemical vapour deposition (PECVD) by using methylamine borane as a single source molecular precursor. This easy and inexpensive method allows controlled and reproducible growth of B-C-N layers onto thin Cu foils. Their morphological, structural, chemical, optical and transport properties have been thoroughly characterized by a number of different microscopies, transport and spectroscopic techniques. Though disorder and segregation into C-rich and h-BN-rich domains have been observed in ultrathin flat few layers, high doping levels have been reached, inducing strong modifications of the electronic, optical and transport properties of C-rich and h-BN-rich phases. This synthesis procedure can open new routes towards the achievement of homogeneous highly mixed ternary B-C-N phases