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GaAs photonic crystal slab nanocavities: Growth, fabrication, and quality factor
- Source :
- Photonics and Nanostructures - Fundamentals and Applications. 8:1-6
- Publication Year :
- 2010
- Publisher :
- Elsevier BV, 2010.
-
Abstract
- In an effort to understand why short wavelength (~1000 nm) GaAs-based photonic crystal slab nanocavities have much lower quality factors (Q) than predicted (and observed in Si), many samples were grown, fabricated into nanocavities, and studied by atomic force, transmission electron, and scanning electron microscopy as well as optical spectroscopy. The top surface of the AlGaAs sacrificial layer can be rough even when the top of the slab is smooth; growth conditions are reported that reduce the AlGaAs roughness by an order of magnitude, but this had little effect on Q. The removal of the sacrificial layer by hydrogen fluoride can leave behind a residue; potassium hydroxide completely removes the residue, resulting in higher Qs.
- Subjects :
- Fabrication
Materials science
business.industry
Scanning electron microscope
Photonic integrated circuit
Nanophotonics
Nanowire
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
Optics
Hardware and Architecture
Slab
Optoelectronics
Electrical and Electronic Engineering
business
Plasmon
Photonic crystal
Subjects
Details
- ISSN :
- 15694410
- Volume :
- 8
- Database :
- OpenAIRE
- Journal :
- Photonics and Nanostructures - Fundamentals and Applications
- Accession number :
- edsair.doi.dedup.....c7853956b834f8ebed63faf71c1e32c0