Optical microelectromechanical systems (OMEMS) based on silicon-on-insulator (SOI) technology

Microelectromechanical systems (MEMS) combined with optical components add optical functionality to the devices and lead to the terms OMEMS and MOEMS. The underlying technology of the presented devices is the silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting devices for commercial applications. Another different microfabrication process yields optical near-field sensors with an optical resolution of 32 nm.