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Optical Recording Using High Numerical-Aperture Microlens by Plasma Etching
- Source :
- Japanese Journal of Applied Physics. 40:1792
- Publication Year :
- 2001
- Publisher :
- IOP Publishing, 2001.
-
Abstract
- We have fabricated a plasma-etched lens about three times larger than our previous design by using a novel selectivity control technique during transfer processes, and performed phase-change optical recording for the digital-video-recording (DVR)-blue format. We have fabricated an aspherical plasma etched lens using the selectivity control transfer technique.
- Subjects :
- Microlens
Plasma etching
Materials science
Physics and Astronomy (miscellaneous)
business.industry
technology, industry, and agriculture
General Engineering
General Physics and Astronomy
Control transfer
Plasma
law.invention
Lens (optics)
Optics
law
Optical recording
parasitic diseases
Optoelectronics
sense organs
High numerical aperture
business
Selectivity
Subjects
Details
- ISSN :
- 13474065 and 00214922
- Volume :
- 40
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi.dedup.....c5353f62e29bc7a5a04638d04ed4e23d
- Full Text :
- https://doi.org/10.1143/jjap.40.1792