EUV near normal incidence collector development at SAGEM

MLA

R. Mercier Ythier, et al. EUV near Normal Incidence Collector Development at SAGEM. Feb. 2008. EBSCOhost, https://doi.org/10.1117/12.787620⟩.

APA

R. Mercier Ythier, Andre Rinchet, Benoit Sassolas, Jean-Marie Mackowski, Marie-Françoise Ravet-Krill, Christophe Michel, Roland Geyl, Laurent Pinard, Elodie Roméo, Xavier Bozec, R. Flaminio, Christophe Hecquet, N. Morgado, Franck Delmotte, & J.-L. Montorio. (2008). EUV near normal incidence collector development at SAGEM. https://doi.org/10.1117/12.787620⟩

Chicago

R. Mercier Ythier, Andre Rinchet, Benoit Sassolas, Jean-Marie Mackowski, Marie-Françoise Ravet-Krill, Christophe Michel, Roland Geyl, et al. 2008. “EUV near Normal Incidence Collector Development at SAGEM,” February. doi:10.1117/12.787620⟩.