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Structural and optical properties of hydrogenated amorphous silicon-carbon grown by plasma enhanced chemical vapour deposition at various rf powers
- Publication Year :
- 2002
- Publisher :
- Taylor & Francis Limited:Rankine Road, Basingstoke RG24 8PR United Kingdom:011 44 1256 813035, EMAIL: madeline.sims@tandf.co.uk, info@tandf.co.uk, INTERNET: http://www.tandf.co.uk, Fax: 011 44 1256 330245, 2002.
- Subjects :
- General Chemical Engineering
General Physics and Astronomy
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....c2e8df7d299061af8aa10a5ce9c1f2f7