Precision Control of Magnetic Drive Actuator Used for Laser Cutting wirh Compensation of Zero Point of Displacement Sensor

This paper describes a precision control method for a magnetic drive actuator used for the laser cutting to realize high speed and high accuracy machining. Firstly, a zero bias current method is applied to drive the electromagnets to achieve a high-precision and long-stroke of the actuator. Secondly, a compensation method of the zero point of the displacement sensors is presented to prevent the generation of the disturbance force produced by the elastic hinges. Finally, the positioning performance of the actuator is evaluated through experiments and the experimental results show that the actuator has a positioning resolution of the order of micrometer, a bandwidth greater than 130Hz, and a positioning stroke of 1mm.