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Electroless selective deposition of gold nano-array for silicon nanowires growth
- Source :
- Nanofabrication, Vol 1, Iss 2014, Pp 1-7 (2013)
- Publication Year :
- 2013
- Publisher :
- Eurasia Academic Publishing Group, 2013.
-
Abstract
- Nanopatterns of gold clusters on a large surface of oriented Si(111) substrates, from the galvanic displacement of gold salt (via the spontaneous reduction of AuCl4 -), are demonstrated in this work. The Si substrate is patterned by Focused Ion Beam (FIB) prior to being dipped in a gold solution. Here, we show that these patterns lead to successful control of the position and size of gold clusters. Sequential patterning reveals a powerful maskless alternative to surface preparation prior to Si nanowire growth.
Details
- ISSN :
- 2299680X
- Volume :
- 1
- Database :
- OpenAIRE
- Journal :
- Nanofabrication
- Accession number :
- edsair.doi.dedup.....c18df1ea0d84dab9b06eb45684b5d6fe