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Complex dewetting scenarios of ultrathin silicon films for large-scale nanoarchitectures
- Source :
- Science Advances (2017): eaao1472. doi:10.1126/sciadv.aao1472, info:cnr-pdr/source/autori:Naffouti M.; Backofen R.; Salvalaglio M.; Bottein T.; Lodari M.; Voigt A.; David T.; Benkouider A.; Fraj I.; Favre L.; Ronda A. ; Berbezier I.; Grosso D.; Abbarchi M.; Bollani M./titolo:Complex dewetting scenarios of ultra-thin silicon films for large-scale nano-architectures/doi:10.1126%2Fsciadv.aao1472/rivista:Science Advances/anno:2017/pagina_da:eaao1472/pagina_a:/intervallo_pagine:eaao1472/volume, Science Advances, Science Advances, 2017, 3 (11), Science Advances, American Association for the Advancement of Science (AAAS), 2017, 3 (11)
- Publication Year :
- 2017
- Publisher :
- American Association for the Advancement of Science (AAAS), 2017.
-
Abstract
- Si-based nanoarchitectures are formed with unprecedented precision and reproducibility via templated dewetting of thin SOI.<br />Dewetting is a ubiquitous phenomenon in nature; many different thin films of organic and inorganic substances (such as liquids, polymers, metals, and semiconductors) share this shape instability driven by surface tension and mass transport. Via templated solid-state dewetting, we frame complex nanoarchitectures of monocrystalline silicon on insulator with unprecedented precision and reproducibility over large scales. Phase-field simulations reveal the dominant role of surface diffusion as a driving force for dewetting and provide a predictive tool to further engineer this hybrid top-down/bottom-up self-assembly method. Our results demonstrate that patches of thin monocrystalline films of metals and semiconductors share the same dewetting dynamics. We also prove the potential of our method by fabricating nanotransfer molding of metal oxide xerogels on silicon and glass substrates. This method allows the novel possibility of transferring these Si-based patterns on different materials, which do not usually undergo dewetting, offering great potential also for microfluidic or sensing applications.
- Subjects :
- EBL
Materials science
Silicon
Materials Science
Microfluidics
chemistry.chemical_element
Nanotechnology
02 engineering and technology
01 natural sciences
UT-SOI
Monocrystalline silicon
Surface tension
0103 physical sciences
Dewetting
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Thin film
010306 general physics
Research Articles
Surface diffusion
patterning
Multidisciplinary
business.industry
SciAdv r-articles
021001 nanoscience & nanotechnology
Semiconductor
chemistry
dewetting
0210 nano-technology
business
Research Article
Subjects
Details
- ISSN :
- 23752548
- Volume :
- 3
- Database :
- OpenAIRE
- Journal :
- Science Advances
- Accession number :
- edsair.doi.dedup.....befe003fcb788eebf4daefde77d3ba6a