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Dynamic behavior of silicon nanocrystal memories during the hot carrier injection

Authors :
Vincenzo Della Marca
G. Molas
J.-L. Ogier
Julien Delalleau
L. Masoero
F. Lalande
Jérémy Postel-Pellerin
Philippe Boivin
J. Amouroux
Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP)
Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)
STMicroelectronics [Rousset] (ST-ROUSSET)
Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI)
Direction de Recherche Technologique (CEA) (DRT (CEA))
Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)
Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)
Source :
IEEE International Conference on Solid Dielectrics (ICSD 2013), IEEE International Conference on Solid Dielectrics (ICSD 2013), Jun 2013, Bologne, Italy. ⟨10.1109/ICSD.2013.6619820⟩
Publication Year :
2013
Publisher :
HAL CCSD, 2013.

Abstract

International audience; In this paper we present the last improvement on programming window and consumption of silicon nanocrystal memory cell (Si-nc). Using a dynamic technique to measure the drain current during the hot carrier injection (HCI) programming operation, we explain the behavior of Flash floating gate (F.G.) and silicon nanocrystal memories. We use TCAD simulations to reproduce the charge diffusion in the nanocrystal trapping layer in order to understand the physical mechanism. Finally experimental results of electrical characterizations are shown using different bias conditions to compare the devices.

Details

Language :
English
Database :
OpenAIRE
Journal :
IEEE International Conference on Solid Dielectrics (ICSD 2013), IEEE International Conference on Solid Dielectrics (ICSD 2013), Jun 2013, Bologne, Italy. ⟨10.1109/ICSD.2013.6619820⟩
Accession number :
edsair.doi.dedup.....be617f7a104786f5bebac7f276daf21c
Full Text :
https://doi.org/10.1109/ICSD.2013.6619820⟩