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A lithographically-patterned, elastic multi-electrode array for surface stimulation of the spinal cord
- Source :
- Biomedical Microdevices. 10:259-269
- Publication Year :
- 2007
- Publisher :
- Springer Science and Business Media LLC, 2007.
-
Abstract
- A new, scalable process for microfabrication of a silicone-based, elastic multi-electrode array (MEA) is presented. The device is constructed by spinning poly(dimethylsiloxane) (PDMS) silicone elastomer onto a glass slide, depositing and patterning gold to construct wires and electrodes, spinning on a second PDMS layer, and then micropatterning the second PDMS layer to expose electrode contacts. The micropatterning of PDMS involves a custom reactive ion etch (RIE) process that preserves the underlying gold thin film. Once completed, the device can be removed from the glass slide for conformal interfacing with neural tissue. Prototype MEAs feature electrodes smaller than those known to be reported on silicone substrate (60 microm diameter exposed electrode area) and were capable of selectively stimulating the surface of the in vitro isolated spinal cord of the juvenile rat. Stretchable serpentine traces were also incorporated into the functional PDMS-based MEA, and their implementation and testing is described.
- Subjects :
- Materials science
Surface Properties
Biomedical Engineering
Action Potentials
macromolecular substances
In Vitro Techniques
Article
chemistry.chemical_compound
Silicone
Electrode array
Animals
Reactive-ion etching
Molecular Biology
Neurons
business.industry
technology, industry, and agriculture
Equipment Design
Electric Stimulation
Electrodes, Implanted
Rats
Equipment Failure Analysis
Microelectrode
Spinal Cord
chemistry
Electrode
Optoelectronics
business
Microelectrodes
Layer (electronics)
Microfabrication
Micropatterning
Biomedical engineering
Subjects
Details
- ISSN :
- 15728781 and 13872176
- Volume :
- 10
- Database :
- OpenAIRE
- Journal :
- Biomedical Microdevices
- Accession number :
- edsair.doi.dedup.....be0eb338e0626e2a33c10e3258e67c59