Miniaturized chemical analysis systems

A new concept for miniaturised analysis systems, based on a modular assembly of silicon system components on a anodically bonded base plate containing fluid channels, is presented. The proposed configuration allows the separate development of the different system elements as well as an easy modification of the system setup. Besides micropumps and flow-sensors, for detection, different ISFET-based chemical sensors for cations are presented. Using covalent attachment of all membrane components to the polymer matrix, a durable CHEMFET system is obtained. It is shown that such sensors can be very well incorporated in a continuous flow system, e.g. a Flow Injection Analysis (FIA) system. Finally, the realization of a liquid dosing module and a modular setup for a Micro Total Analysis System (μTAS) is illustrated. Possible applications of such μTAS are discussed, and future markets are indicated.