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Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip
- Publication Year :
- 2010
- Publisher :
- American Institute of Physics, 2010.
-
Abstract
- This paper reports using femtosecond laser marker to fabricate the three-dimensional interior microstructures in one closed flow channel of plastic substrate. Strip-like slots in the dimensions of 800 μm×400 μm×65 μm were ablated with pulse Ti:sapphire laser at 800 nm (pulse duration of ∼120 fs with 1 kHz repetition rate) on acrylic slide. After ablation, defocused beams were used to finish the surface of microstructures. Having finally polished with sonication, the laser fabricated structures are highly precise with the arithmetic roughness of 1.5 and 4.5 nm. Fabricating such highly precise microstructures cannot be accomplished with nanosecond laser marking or other mechanical drilling methods. In addition, since laser ablation can directly engrave interior microstructures in one closed chip, glue smearing problems to damage molded microstructures possibly to occur during the chip sealing procedures can be avoided too.
- Subjects :
- Fluid Flow and Transfer Processes
Materials science
Laser ablation
business.industry
Biomedical Engineering
Pulse duration
Nanotechnology
Substrate (electronics)
Surface finish
Lab-on-a-chip
Condensed Matter Physics
Laser
law.invention
Colloid and Surface Chemistry
law
Femtosecond
Sapphire
Optoelectronics
General Materials Science
Fabrication and Laboratory Methods
business
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....bccbddfb97673ee9a24adb7c9fa40eb2