Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: a physics and chemistry perspective

Authors :: Sang-wuk Park
Keizo Kinoshita
Kenji Ishikawa
Silvia Armini
Gottlieb S. Oehrlein
Tatsuru Shirafuji
Keren J. Kanarik
Yasuhiro Morikawa
Richard A. Gottscho
Hisataka Hayashi
Tatsuo Ishijima
Nathan P. Marchack
Gert J. Leusink
Emilie Despiau-Pujo
Takahide Murayama
Laboratoire des technologies de la microélectronique (LTM )
Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019])
Source :: Japanese Journal of Applied Physics, Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2019, 58 (SE), pp.SE0801. ⟨10.7567/1347-4065/ab163e⟩, Japanese Journal of Applied Physics, 2019, 58 (SE), pp.SE0801. ⟨10.7567/1347-4065/ab163e⟩
Publication Year :: 2019
Publisher :: HAL CCSD, 2019.
Abstract: International audience

Subjects :: 010302 applied physics
Physics and Astronomy (miscellaneous)
Chemistry
Perspective (graphical)
General Engineering
General Physics and Astronomy
Nanotechnology
02 engineering and technology
Surface reaction
021001 nanoscience & nanotechnology
01 natural sciences
0103 physical sciences
Chemistry (relationship)
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
0210 nano-technology
Nanoscopic scale
ComputingMilieux_MISCELLANEOUS

Language :: English
ISSN :: 00214922
Database :: OpenAIRE
Journal :: Japanese Journal of Applied Physics, Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2019, 58 (SE), pp.SE0801. ⟨10.7567/1347-4065/ab163e⟩, Japanese Journal of Applied Physics, 2019, 58 (SE), pp.SE0801. ⟨10.7567/1347-4065/ab163e⟩
Accession number :: edsair.doi.dedup.....bca17bb5242eaeeee079b4e77984bcef

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