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Burger Model as the Best Option for Modeling of Viscoelastic Behavior of Resists for Nanoimprint Lithography
- Source :
- Materials, Vol 14, Iss 6639, p 6639 (2021), Materials, Volume 14, Issue 21
- Publication Year :
- 2021
-
Abstract
- In this study, Atomic Force Microscopy-based nanoindentation (AFM-NI) with diamond-like carbon (DLC) coated tip was used to analyze the mechanical response of poly(methyl methacrylate) (PMMA) thin films (thicknesses: 235 and 513 nm) on a silicon substrate. Then, Oliver and Pharr (OP) model was used to calculate hardness and Young’s modulus, while three different Static Linear Solid models were used to fit the creep curve and measure creep compliance, Young’s modulus, and viscosity. Values were compared with each other, and the best-suited method was suggested. The impact of four temperatures below the glass transition temperature and varied indentation depth on the mechanical properties has been analyzed. The results show high sensitivity on experiment parameters and there is a clear difference between thin and thick film. According to the requirements in the nanoimprint lithography (NIL), the ratio of hardness at demolding temperature to viscosity at molding temperature was introduced as a simple parameter for prediction of resist suitability for NIL. Finally, thinner PMMA film was tentatively attributed as more suitable for NIL.
- Subjects :
- Burger creep model
Technology
Materials science
Young's modulus
atomic force microscopy-based nanoindentation
Article
Viscoelasticity
Nanoimprint lithography
law.invention
Viscosity
symbols.namesake
law
Indentation
nanoimprint lithography
General Materials Science
Young’s modulus
Composite material
Microscopy
QC120-168.85
QH201-278.5
Nanoindentation
Engineering (General). Civil engineering (General)
PMMA
hardness
TK1-9971
Resist
Creep
Descriptive and experimental mechanics
viscosity
symbols
Electrical engineering. Electronics. Nuclear engineering
TA1-2040
Subjects
Details
- ISSN :
- 19961944
- Volume :
- 14
- Issue :
- 21
- Database :
- OpenAIRE
- Journal :
- Materials (Basel, Switzerland)
- Accession number :
- edsair.doi.dedup.....baa6edc965e16abbeaca4e0611b78710