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Sputtering of rough surfaces: a 3D simulation study

Authors :
A Mutzke
Armin Manhard
U. von Toussaint
Source :
Physica Scripta
Publication Year :
2017
Publisher :
IOP Publishing, 2017.

Abstract

The lifetime of plasma-facing components is critical for future magnetic confinement fusion power plants. A key process limiting the lifetime of the first-wall is sputtering by energetic ions. To provide a consistent modeling of the sputtering process of realistic geometries, the SDTrimSP-code has been extended to enable the processing of analytic as well as measured arbitrary 3D surface morphologies. The code has been applied to study the effect of varying the impact angle of ions on rough surfaces on the sputter yield as well as the influence of the aspect ratio of surface structures on the 2D distribution of the local sputtering yields. Depending on the surface morphologies reductions of the effective sputter yields to less than 25% have been observed in the simulation results.

Details

ISSN :
14024896 and 00318949
Database :
OpenAIRE
Journal :
Physica Scripta
Accession number :
edsair.doi.dedup.....b966c38d3189744ef25408fb05e1e447