Quantitative gas composition analysis method for a wide pressure range up to atmospheric pressure–CO2 plasma case study

A mass spectrometer with a custom sampling system comprising one fixed and one variable orifice is presented. The custom sampling system allows the determination of the gas composition in the pressure range from 5 mbar to 1000 mbar, with low gas-demixing (2, CO, O2, and N2 gases is presented, together with an example of the CO2 conversion at a microwave plasma torch. The absolute error of the measured conversion of CO2 in CO is found to be less than 1.6% in the complete pressure range. The conversion determination routine presented here allows us to determine relative molar flows of CO2, CO, O2, and N2 and to distinguish between CO and N2 gases, which is important for the determination of the CO2 conversion in the case of air impurities or in the case of CO2/N2 mixtures.