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Design, fabrication, and characterisation of wire grid polarizers for the deep UV spectral range
- Source :
- Dipòsit Digital de Documents de la UAB, Universitat Autònoma de Barcelona, Digital.CSIC. Repositorio Institucional del CSIC, instname
- Publication Year :
- 2018
- Publisher :
- Society of Photo-Optical Instrumentation Engineers, 2018.
-
Abstract
- In this communication, we show preliminary results on transmissive TiO2 wire-grid polarizers (WGP) operating in the deep ultraviolet (DUV) range. WGP are devices based on strips of materials with large values of the modulus of the dielectric constant along with high absorption in the operational range. The merit function Π is introduced as a new tool to find the optimum material for WGPs in a given spectral range. The experimental dielectric constant of TiO2 thin films deposited by pulsed laser deposition are obtained through spectroscopic ellipsometry, and the Π function indicates that TiO2 is the best candidate for WGP in the DUV range when it is compared with other oxides. Once the material selection for WGP is done, we present and compare two different design approaches for WGP: one using an effective medium theory for the periodic structure, and the second using finite-difference time-domain (FDTD) analysis. A prototype of WGP is fabricated by electron beam (e-beam) lithography followed by lift-off process; the topography of the sample is analyzed by AFM, and we found noticeable deviations in the grating from the designed values. In preliminary characterization work the effective dielectric constant in two perpendicular orientations is obtained by ellipsometry and the contrast is compared with the design<br />We acknowledge Singapore Synchrotron Light Source for providing the facility necessary for conducting the research. The Laboratory is a National Research Infrastructure under the National Research Foundation, Singapore.
- Subjects :
- Materials science
business.industry
Effective dielectric constants
Finite-difference time-domain method
Material selection
Dielectric
Grating
Polarizer
Deep ultraviolet
Design approaches
Pulsed laser deposition
law.invention
Operational range
law
Ellipsometry
Wire grid polarizers
Optoelectronics
Effective medium theories
Thin film
business
Lithography
Perpendicular orientation
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Dipòsit Digital de Documents de la UAB, Universitat Autònoma de Barcelona, Digital.CSIC. Repositorio Institucional del CSIC, instname
- Accession number :
- edsair.doi.dedup.....b5c3ca4dc8a2faa3f80302bbd0df720a