Back to Search Start Over

A miniature effusion cell for the vacuum deposition of organic solids with low vapor pressures in surface science studies

Authors :
Jun Yoshinobu
Kozo Mukai
Tetsuo Katayama
Source :
The Review of scientific instruments. 79(7)
Publication Year :
2008

Abstract

A miniature effusion cell for the vacuum deposition of volatile organic solids with low vapor pressures has been fabricated and used in surface science studies. The effusion cell is designed to operate at up to 200 degrees C under ultrahigh vacuum (UHV) conditions. The size of this cell is so small that it is attached to the top of a transfer rod and can be introduced from a subchamber into a main UHV chamber (retrievable). In addition, the small heat capacity of this cell means rapid heating and cooling rates. The advantages of this evaporator are its simplicity of design and ease of fabrication, assembly, and operation.

Details

ISSN :
00346748
Volume :
79
Issue :
7
Database :
OpenAIRE
Journal :
The Review of scientific instruments
Accession number :
edsair.doi.dedup.....b4be1170e8e8b3f79e556e927817246b