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A calibration-free method to assess the quality of standards for THz on-wafer measurements

Authors :
Maxim Masyukov
Irina Nefedova
Aleksi Tamminen
Kimmo Silvonen
Juan Cabello-Sanchez
Mikko Varonen
Mikko Kantanen
Helena Rodilla
Jan Stake
Zachary Taylor
Source :
Masyukov, M, Nefedova, I, Tamminen, A, Silvonen, K, Cabello-Sanchez, J, Varonen, M, Kantanen, M, Rodilla, H, Stake, J & Taylor, Z 2022, A calibration-free method to assess the quality of standards for THz on-wafer measurements . in IRMMW-THz 2022 : 47th International Conference on Infrared, Millimeter and Terahertz Waves . IEEE Institute of Electrical and Electronic Engineers, International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, vol. 2022-August, 47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022, Delft, Netherlands, 28/08/22 . https://doi.org/10.1109/IRMMW-THz50927.2022.9895704
Publication Year :
2022
Publisher :
IEEE Institute of Electrical and Electronic Engineers, 2022.

Abstract

A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.

Details

Language :
English
Database :
OpenAIRE
Journal :
Masyukov, M, Nefedova, I, Tamminen, A, Silvonen, K, Cabello-Sanchez, J, Varonen, M, Kantanen, M, Rodilla, H, Stake, J & Taylor, Z 2022, A calibration-free method to assess the quality of standards for THz on-wafer measurements . in IRMMW-THz 2022 : 47th International Conference on Infrared, Millimeter and Terahertz Waves . IEEE Institute of Electrical and Electronic Engineers, International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, vol. 2022-August, 47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022, Delft, Netherlands, 28/08/22 . https://doi.org/10.1109/IRMMW-THz50927.2022.9895704
Accession number :
edsair.doi.dedup.....b3eeadc836ac3622f80ec688e09efa8b
Full Text :
https://doi.org/10.1109/IRMMW-THz50927.2022.9895704