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Methodology to evaluate the uncertainty associated with nanoparticle dimensional measurements by SEM
- Source :
- Measurement Science and Technology, Measurement Science and Technology, IOP Publishing, 2019, 30 (8), pp.085004. ⟨10.1088/1361-6501/ab1495⟩
- Publication Year :
- 2019
- Publisher :
- IOP Publishing, 2019.
-
Abstract
- International audience; The scanning electron microscopy (SEM) technique is widely used for the characterizing of nanoparticle (NP) size, but very few papers deal with NP dimensional metrology. This article reports on a methodology with which to evaluate the uncertainty budget associated with the measurement of the mean diameter of a standard silica NP population by SEM. In this context, the effects of potential error sources have been evaluated though a metrological qualification of the instrument. The measuring method, consisting of determining the area equivalent diameter taken at middle height (D eq-FWHM), has been tested on a reference silica NP with an indicative certification value given by SEM/TEM (number-based modal diameter). Because agglomeration phenomena can cause measurements errors, semi-automatic homemade software has been employed to build the diameter distribution histogram, selecting only isolated particles. Finally, an uncertainty budget, including the main experimental components, has been established for the mean diameter measurement of this silica NP population. The main contributors to this uncertainty budget are the resolution linked to the dimension of the electron beam diameter at the focal plane, the calibration uncertainty on reference NPs, and the measurement repeatability.
- Subjects :
- Materials science
Scanning electron microscope
[PHYS.MPHY]Physics [physics]/Mathematical Physics [math-ph]
Population
Context (language use)
Electron
01 natural sciences
[SPI.AUTO]Engineering Sciences [physics]/Automatic
010309 optics
Optics
Diameter
[PHYS.QPHY]Physics [physics]/Quantum Physics [quant-ph]
Dimensional metrology
0103 physical sciences
Calibration
Hydraulic diameter
[PHYS.MECA.MEFL]Physics [physics]/Mechanics [physics]/Fluid mechanics [physics.class-ph]
[PHYS.MECA.BIOM]Physics [physics]/Mechanics [physics]/Biomechanics [physics.med-ph]
education
Instrumentation
Engineering (miscellaneous)
[SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph]
[PHYS.MECA.VIBR]Physics [physics]/Mechanics [physics]/Vibrations [physics.class-ph]
education.field_of_study
Uncertainty budget
business.industry
[SPI.FLUID]Engineering Sciences [physics]/Reactive fluid environment
Applied Mathematics
[SPI.NRJ]Engineering Sciences [physics]/Electric power
Beam
Size distribution
[CHIM.MATE]Chemical Sciences/Material chemistry
[PHYS.MECA.MSMECA]Physics [physics]/Mechanics [physics]/Materials and structures in mechanics [physics.class-ph]
[PHYS.MECA.ACOU]Physics [physics]/Mechanics [physics]/Acoustics [physics.class-ph]
Metrology
[SPI.ELEC]Engineering Sciences [physics]/Electromagnetism
[CHIM.POLY]Chemical Sciences/Polymers
Cardinal point
SEM
[PHYS.MECA.THER]Physics [physics]/Mechanics [physics]/Thermics [physics.class-ph]
Nanoparticles
business
Subjects
Details
- ISSN :
- 13616501 and 09570233
- Volume :
- 30
- Database :
- OpenAIRE
- Journal :
- Measurement Science and Technology
- Accession number :
- edsair.doi.dedup.....af4615f1ba6feccfaffc4a8fdf8aa3e2