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Role of carbon content in tuning the physical quantities of a-Si1-xCx:H alloys deposited by PECVD
- Publication Year :
- 2011
- Publisher :
- Wiley, 2011.
-
Abstract
- Silicon rich hydrogenated amorphous silicon-carbon alloy films were deposited by plasma enhanced chemical vapour deposition in low power regime from silane methane mixtures diluted in helium by varying the methane fraction between 0.4 and 0.8. Films with carbon content ranging from 0.06 to 0.28 were obtained with a deposition rate of about 0.1 nm/s. The influence of carbon incorporation on the optical properties as well as disorder and defect density of the films has been investigated. The increase in carbon content leads to a decrease of the refractive index and an increase of the optical gap and disorder in the films. The defect density also increases with increasing carbon content, however lower values than those of films deposited by undiluted silane methane mixtures have been obtained for a carbon content greater than 0.1. Finally, the enhancement of carbon content causes the shift of peak position as well as the increase in the intensity and the width of the photoluminescence spectra. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
- Subjects :
- Peak position
Photoluminescence spectrum
Materials science
Silicon
Carbon film
Analytical chemistry
Silicon rich, Amorphous carbon
Refractive index
chemistry.chemical_element
Helium
Methane
chemistry.chemical_compound
Plasma enhanced chemical vapor deposition
A-carbon
Plasma-enhanced chemical vapor deposition
Disorder
Photoluminescence
Plasma enhanced chemical vapour deposition
Amorphous film
Amorphous silicon
Carbon content
Condensed Matter Physics
Silane
Silicon alloys, Defect density
Amorphous solid
CHIM/02 - CHIMICA FISICA
chemistry
Amorphous carbon
Low Power
Hydrogenated amorphous silicon
Defect
Hydrogenation
Plasma deposition
Optical gap
Physical quantitie
Carbon
Carbon incorporation
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....af350c5d8fa588fc2a577dc844d5e96d