A Nanoscale Sensor Based on a Toroidal Cavity with a Built-In Elliptical Ring Structure for Temperature Sensing Application

In this article, a refractive index sensor based on Fano resonance, which is generated by the coupling of a metal–insulator–metal (MIM) waveguide structure and a toroidal cavity with a built-in elliptical ring (TCER) structure, is presented. The finite element method (FEM) was employed to analyze the propagation characteristics of the integral structure. The effects of refractive index and different geometric parameters of the structure on the sensing characteristics were evaluated. The maximum sensitivity was 2220 nm/RIU with a figure of merit (FOM) of 58.7, which is the best performance level that the designed structure could achieve. Moreover, due to its high sensitivity and simple structure, the refractive index sensor can be applied in the field of temperature detection, and its sensitivity is calculated to be 1.187 nm/℃.