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Hybrid Integrated Platforms for Silicon Photonics

Authors :
Gunther Roelkens
John E. Bowers
Di Liang
Roel Baets
Source :
Materials, Vol 3, Iss 3, Pp 1782-1802 (2010), MATERIALS, Materials
Publication Year :
2010
Publisher :
MDPI AG, 2010.

Abstract

A review of recent progress in hybrid integrated platforms for silicon photonics is presented. Integration of III-V semiconductors onto silicon-on-insulator substrates based on two different bonding techniques is compared, one comprising only inorganic materials, the other technique using an organic bonding agent. Issues such as bonding process and mechanism, bonding strength, uniformity, wafer surface requirement, and stress distribution are studied in detail. The application in silicon photonics to realize high-performance active and passive photonic devices on low-cost silicon wafers is discussed. Hybrid integration is believed to be a promising technology in a variety of applications of silicon photonics.

Details

ISSN :
19961944
Volume :
3
Database :
OpenAIRE
Journal :
Materials
Accession number :
edsair.doi.dedup.....ac2afb0b5e8dfc1db35abc091df9c82b
Full Text :
https://doi.org/10.3390/ma3031782