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Hybrid Integrated Platforms for Silicon Photonics
- Source :
- Materials, Vol 3, Iss 3, Pp 1782-1802 (2010), MATERIALS, Materials
- Publication Year :
- 2010
- Publisher :
- MDPI AG, 2010.
-
Abstract
- A review of recent progress in hybrid integrated platforms for silicon photonics is presented. Integration of III-V semiconductors onto silicon-on-insulator substrates based on two different bonding techniques is compared, one comprising only inorganic materials, the other technique using an organic bonding agent. Issues such as bonding process and mechanism, bonding strength, uniformity, wafer surface requirement, and stress distribution are studied in detail. The application in silicon photonics to realize high-performance active and passive photonic devices on low-cost silicon wafers is discussed. Hybrid integration is believed to be a promising technology in a variety of applications of silicon photonics.
- Subjects :
- Technology and Engineering
Materials science
Wafer bonding
Hybrid silicon laser
wafer bonding
Nanotechnology
Review
Hardware_PERFORMANCEANDRELIABILITY
lcsh:Technology
Hardware_INTEGRATEDCIRCUITS
General Materials Science
Wafer
lcsh:Microscopy
lcsh:QC120-168.85
Bonding process
Silicon photonics
silicon photonics
lcsh:QH201-278.5
lcsh:T
business.industry
hybrid integration
Semiconductor
lcsh:TA1-2040
Bonding strength
lcsh:Descriptive and experimental mechanics
lcsh:Electrical engineering. Electronics. Nuclear engineering
Photonics
lcsh:Engineering (General). Civil engineering (General)
business
lcsh:TK1-9971
Subjects
Details
- ISSN :
- 19961944
- Volume :
- 3
- Database :
- OpenAIRE
- Journal :
- Materials
- Accession number :
- edsair.doi.dedup.....ac2afb0b5e8dfc1db35abc091df9c82b
- Full Text :
- https://doi.org/10.3390/ma3031782