Back to Search Start Over

Physical and Technological Limits in Size of Semiconductor Devices

Authors :
Takuo Sugano
Source :
Extended Abstracts of the 1975 Conference on Solid State Devices.
Publication Year :
1975
Publisher :
The Japan Society of Applied Physics, 1975.

Subjects

Subjects :
Materials science
Physics and Astronomy (miscellaneous)
General Engineering
General Physics and Astronomy
Nanotechnology
Semiconductor device
Engineering physics

Details

Database :
OpenAIRE
Journal :
Extended Abstracts of the 1975 Conference on Solid State Devices
Accession number :
edsair.doi.dedup.....a8db155c6acc9d4cb88e3ddedadd9f6f
Full Text :
https://doi.org/10.7567/ssdm.1975.e-2-1
Full Text Access
View/download PDF

Tools

Authors Abstract Subjects Details