Hybridization of Love surface acoustic waves in SiO2/ST-Quartz structure with resonant pillars grafted on the meta-surface

poster; International audience; The control of propagating waves can be achieved by introducing defect states in the phononic structure of the electroacoustic devices. This work investigates the interaction of Love waves in cavity-containing holey SiO2/Quartz structure with grafted Ni pillars. An optimal sized cavity in the holey PnC enables to obtain a cavity mode that matches the torsional resonance mode of the pillars. We showed that the cavity mode/Pillar resonance coupling depends drastically on the positions of pillars related to nodes and anti-nodes of the cavity mode. These effects are used to design a micro-electromechanical resonator presenting high quality factor without increasing the crystal size in comparison to cavity without pillars.