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A Low‐Temperature Batch Process for the Deposition of High‐Quality Conformal Alumina Thin Films for Electronic Applications

Authors :
Gregory Burwell
Klaudia Rejnhard
Jon Evans
Jacob Mitchell
Michael T. Grimes
Matt Elwin
Ardalan Armin
Paul Meredith
Source :
Advanced Engineering Materials.
Publication Year :
2023
Publisher :
Wiley, 2023.

Subjects

Subjects :
General Materials Science
Condensed Matter Physics

Details

ISSN :
15272648 and 14381656
Database :
OpenAIRE
Journal :
Advanced Engineering Materials
Accession number :
edsair.doi.dedup.....a89447fcce75f08384fc321e9f6dea39

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