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Tailoring strain in the SrTiO3 compound by low-energy He+ irradiation
- Source :
- EPL-Europhysics Letters, EPL-Europhysics Letters, European Physical Society/EDP Sciences/Società Italiana di Fisica/IOP Publishing, 2010, pp.36005. ⟨10.1209/0295-5075/92/36005⟩, EPL-Europhysics Letters, 2010, pp.36005. ⟨10.1209/0295-5075/92/36005⟩
- Publication Year :
- 2010
- Publisher :
- HAL CCSD, 2010.
-
Abstract
- The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5-7% are obtained with no evidence of amorphisation at fluences of 1E16 He+ ions/cm2 and ion energies in the range 10-30 keV.<br />Comment: 11 pages, 4 figures, Accepted for publication in Europhysics Letter (http://iopscience.iop.org/0295-5075)
- Subjects :
- 010302 applied physics
Condensed Matter - Materials Science
Range (particle radiation)
Materials science
Strain (chemistry)
General Physics and Astronomy
Materials Science (cond-mat.mtrl-sci)
FOS: Physical sciences
02 engineering and technology
[CHIM.MATE]Chemical Sciences/Material chemistry
021001 nanoscience & nanotechnology
01 natural sciences
Molecular physics
Ion
chemistry.chemical_compound
Lattice constant
Ion implantation
chemistry
0103 physical sciences
Strontium titanate
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
Irradiation
0210 nano-technology
Layer (electronics)
Subjects
Details
- Language :
- English
- ISSN :
- 02955075 and 12864854
- Database :
- OpenAIRE
- Journal :
- EPL-Europhysics Letters, EPL-Europhysics Letters, European Physical Society/EDP Sciences/Società Italiana di Fisica/IOP Publishing, 2010, pp.36005. ⟨10.1209/0295-5075/92/36005⟩, EPL-Europhysics Letters, 2010, pp.36005. ⟨10.1209/0295-5075/92/36005⟩
- Accession number :
- edsair.doi.dedup.....a6af4322dc4dde7c3c7ce9d7019c2fc8
- Full Text :
- https://doi.org/10.1209/0295-5075/92/36005⟩