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Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress

Authors :
Minoru Sasaki
Kazuhiro Hane
Wilfried Noell
Danick Briand
N. F. de Rooij

Abstract

In this paper, we have reported the use of buckled bridges for realizing the vertical comb drive actuators. The detailed characteristics of the buckled bridges and the lifted micromirror using film stress are also examined

Subjects

Subjects :
Stress (mechanics)
Materials science
Optics
business.industry
Comb drive
Structural engineering
business
Actuator

Details

Database :
OpenAIRE
Accession number :
edsair.doi.dedup.....a5a82edb0181c7ce3096916e45905feb

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