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Image reversal reactive immersion lithography improves the detection limit of focal molography: erratum

Authors :
Andreas, Frutiger
Cla Duri, Tschannen
Yves, Blickenstorfer
Andreas M, Reichmuth
Christof, Fatttinger
Janos, Vörös
Source :
Optics Letters. 45:918
Publication Year :
2020
Publisher :
Optica Publishing Group, 2020.

Abstract

Some minor issues were discovered after publication of Opt Lett. 43, 5801 (2018) and are corrected here. They do not change the main message of the paper.

Details

ISSN :
15394794 and 01469592
Volume :
45
Database :
OpenAIRE
Journal :
Optics Letters
Accession number :
edsair.doi.dedup.....a2e4e9a453615612198020ef71b5d4f3
Full Text :
https://doi.org/10.1364/ol.45.000918