Back to Search
Start Over
A Low Spring Constant Piezoresistive Microcantilever for Biological Reagent Detection
- Source :
- Micromachines, Vol 11, Iss 1001, p 1001 (2020), Micromachines, Volume 11, Issue 11
- Publication Year :
- 2020
- Publisher :
- MDPI AG, 2020.
-
Abstract
- This paper introduces a piezoresistive microcantilever with a low spring constant. The microcantilever was fabricated with titanium (Ti) as the piezoresistor, a low spring constant polyimide (PI) layer, and a thin silicon oxide (SiO2) layer as the top and bottom passive layers, respectively. Excellent mechanical performances with the spring constant of 0.02128 N/m and the deflection sensitivity (∆V/V)/∆z of 1.03 &times<br />10&minus<br />7 nm&minus<br />1 were obtained. The output voltage fluctuation of a Wheatstone bridge, which consists of four piezoresistive microcantilevers, is less than 3 &mu<br />V@3 V in a phosphate buffered saline (PBS) environment. A microcantilever aptasensor was then developed through functionalizing the microcantilevers with a ricin aptamer probe, and detections on ricin with concentrations of 10, 20, 50 and 100 ng/mL were successfully realized. A good specificity was also confirmed by using bovine serum albumin (BSA) as a blank control. The experiment results show that the Ti and PI-based microcantilever has great prospects for ultrasensitive biochemical molecule detections with high reliability and specificity.
- Subjects :
- Materials science
Wheatstone bridge
Aptamer
lcsh:Mechanical engineering and machinery
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
01 natural sciences
polyimide
Article
law.invention
law
lcsh:TJ1-1570
Electrical and Electronic Engineering
Bovine serum albumin
Silicon oxide
piezoresistive microcantilever
biology
Mechanical Engineering
010401 analytical chemistry
spring constant
021001 nanoscience & nanotechnology
Piezoresistive effect
ricin
0104 chemical sciences
deflection sensitivity
chemistry
Control and Systems Engineering
Reagent
biology.protein
0210 nano-technology
Polyimide
Titanium
Subjects
Details
- Language :
- English
- Volume :
- 11
- Issue :
- 1001
- Database :
- OpenAIRE
- Journal :
- Micromachines
- Accession number :
- edsair.doi.dedup.....a0ba6c3634cd30d48fc8f125c2c61de2