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Few-layer graphene direct deposition on Ni and Cu foil by cold-wall chemical vapor deposition
- Source :
- Journal of nanoscience and nanotechnology. 12(8)
- Publication Year :
- 2012
-
Abstract
- We report an alternative synthesis process, cold-wall thermal chemical vapor deposition (CVD), is replied to directly deposit single-layer and few-layer graphene films on Ar plasma treated Ni and Cu foils using CH4 as carbon source. Through optimizing the process parameters, large scale single-layer graphene grown on Ni foil is comparable to that grown on Cu foil. The graphene films were able to be transferred to other substrates such as SiO2/Si, flexible transparent PET and verified by optical microscopy, Raman microscopy and scanning electron microscopy. The sheet resistance and transmission of the transferred graphene films on PET substrate were also discussed.
- Subjects :
- Materials science
Hybrid physical-chemical vapor deposition
Graphene
Ion plating
Biomedical Engineering
Bioengineering
General Chemistry
Combustion chemical vapor deposition
Condensed Matter Physics
Electron beam physical vapor deposition
Pulsed laser deposition
law.invention
Chemical engineering
law
Plasma-enhanced chemical vapor deposition
General Materials Science
Thin film
Subjects
Details
- ISSN :
- 15334880
- Volume :
- 12
- Issue :
- 8
- Database :
- OpenAIRE
- Journal :
- Journal of nanoscience and nanotechnology
- Accession number :
- edsair.doi.dedup.....9fad163d5dd2677cb5d6a3a2249e2947