Back to Search
Start Over
High-aperture EUV microscope using multilayer mirrors and a 3D reconstruction algorithm based on z-tomography
- Source :
- Optics express. 30(26)
- Publication Year :
- 2022
-
Abstract
- The article is devoted to the development of an EUV microscope using a wavelength of 13.84 nm. Due to the use of a mirror lens with a large numerical aperture, NA = 0.27, and a short depth of focus, it has been possible to carry out z-tomography of bio-samples for the first time with this type of microscope. A 3D image was reconstructed, and a pixel resolution of 140 nm was obtained. A new simple algorithm for the 3D reconstruction of absorption images from z-tomography data has been proposed that takes into account lens aberrations and a point spread function. The algorithm reduces the inverse absorption task to the corresponding well-studied task of fluorescence microscopy, with an error of 10% for cells up to 10 µm thick.
- Subjects :
- Atomic and Molecular Physics, and Optics
Subjects
Details
- ISSN :
- 10944087
- Volume :
- 30
- Issue :
- 26
- Database :
- OpenAIRE
- Journal :
- Optics express
- Accession number :
- edsair.doi.dedup.....9c71a949a889a0ec6ac71f30af1b1d30