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The Role of Defects and Interface Degradation on Ferroelectric HZO Capacitors Aging

Authors :
Benatti, L.
Vecchi, S.
Pesic, M.
Puglisi, F. M.
Source :
2023 IEEE International Reliability Physics Symposium (IRPS).
Publication Year :
2023
Publisher :
IEEE, 2023.

Details

Database :
OpenAIRE
Journal :
2023 IEEE International Reliability Physics Symposium (IRPS)
Accession number :
edsair.doi.dedup.....9c48fdd01dc54a099b17fc05188a5b32

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