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TCO contacts on poly-Si layers: High and low temperature approaches to maintain passivation and contact properties
- Source :
- 15th International Conference on Concentrator Photovoltaic Systems (CPV-15), 9th International Conference on Crystalline Silicon Photovoltaics, SiliconPV 2019, 9th International Conference on Crystalline Silicon Photovoltaics, SiliconPV 2019, Apr 2019, Leuven, Belgium. ⟨10.1063/1.5123828⟩
- Publication Year :
- 2019
- Publisher :
- AIP Publishing, 2019.
-
Abstract
- International audience; Polysilicon (poly-Si) based passivating contacts are promising to improve silicon solar cells conversion efficiency. Thin poly-Si layers usually feature high sheet resistances compared to conventional diffused junctions. Therefore the use of Transparent Conductive Oxides (TCO) has to be considered to improve lateral conductivity while maintaining good optical and surface passivation properties. Standard sputtered Indium Tin Oxide (ITO) can alter the poly-Si passivation properties. In this work different TCO-based contacts have been investigated (various materials and deposition techniques) in order to contact phosphorus-doped poly-Si layers (n+ poly-Si). The TCO-deposited samples experienced both low and high temperature annealing steps. Implied open circuit voltage above 730 mV and contact resistivity below 50 mΩ.cm2 at the TCO/n+ poly-Si interface have been obtained for both high and low temperature approaches. Thus such novel structures are very promising to contact poly-Si layers.
- Subjects :
- Materials science
Silicon
Passivation
Open-circuit voltage
Annealing (metallurgy)
business.industry
020209 energy
Energy conversion efficiency
chemistry.chemical_element
02 engineering and technology
Conductivity
021001 nanoscience & nanotechnology
7. Clean energy
Indium tin oxide
chemistry
Electrical resistivity and conductivity
0202 electrical engineering, electronic engineering, information engineering
Optoelectronics
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
0210 nano-technology
business
Subjects
Details
- ISSN :
- 0094243X
- Database :
- OpenAIRE
- Journal :
- 15th International Conference on Concentrator Photovoltaic Systems (CPV-15)
- Accession number :
- edsair.doi.dedup.....99fcd715271e862f05d3da6c48c3d45f