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Parametric Studies on Suppression of Secondary Phases in LiNbO3 Thin Films Deposited by Pulsed Laser Deposition

Parametric Studies on Suppression of Secondary Phases in LiNbO3 Thin Films Deposited by Pulsed Laser Deposition

Authors :
Ji-Won Son
Sergei S. Orlov
Bill Phillips
Lambertus Hesselink
Source :
Scopus-Elsevier
Publication Year :
2003
Publisher :
Springer Science and Business Media LLC, 2003.

Abstract

We performed a parametric study to suppress secondary phases in lithium niobate thin films by using pulsed laser deposition (PLD). A KrF excimer laser (λ=248nm) was used as a PLD source and c-oriented sapphire was used as substrates, for waveguide applications. By reducing the growth rate and changing the ambient gas pressure respectively, we found that the main parameter suppressing a secondary phase is controlling the plume strength. To investigate the relation between film phases and the plume strength, extensive parametric studies were performed by changing the oxygen ambient pressure, the target to substrate distance, and also the Li content in the target. The surface morphologies of single phase films and Li-deficient phase mixed films are compared and related to the growth mechanism with a lattice misfit. Deposition parameters to achieve lower loss films are also discussed.

Details

ISSN :
19464274 and 02729172
Volume :
784
Database :
OpenAIRE
Journal :
MRS Proceedings
Accession number :
edsair.doi.dedup.....988cd0b69b86a634bad74aeba55ac312
Full Text :
https://doi.org/10.1557/proc-784-c11.24