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Effect of clamping conditions and built-in stresses on the thermopneumatic deflection of SiO2/Si membranes with various geometries

Authors :
M. Le Berre
D Febvre
C. Malhaire
D. Barbier
P Pinard
INL - Dispositifs Electroniques (INL - DE)
Institut des Nanotechnologies de Lyon (INL)
Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon)
Université de Lyon-Institut National des Sciences Appliquées (INSA)-Université de Lyon-Institut National des Sciences Appliquées (INSA)-École Centrale de Lyon (ECL)
Université de Lyon-Université Claude Bernard Lyon 1 (UCBL)
Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Centre National de la Recherche Scientifique (CNRS)-Institut National des Sciences Appliquées de Lyon (INSA Lyon)
Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)
Source :
Sensors and Actuators A: Physical, Sensors and Actuators A: Physical, Elsevier, 1999, 74 (1-3), pp.174-177. ⟨10.1016/S0924-4247(98)00312-4⟩
Publication Year :
1999
Publisher :
HAL CCSD, 1999.

Abstract

Built-in stresses are known to induce deflections in microstructures such as composite membranes. The thermoelastic behaviour of large square SiO 2 /Si membranes with a side length from 3 to 7.5 mm, a Si thickness in the [7.7–50] μm range and a SiO 2 thickness up to 1.5 μm, was studied by optical profilometry. A very satisfactory agreement within 10% has been found between the experimental and the simulated deflections of prestressed SiO 2 /Si membranes. However, clamping conditions have been found to play a major role in built-in stress relaxation. This tendency was confirmed by Finite Element Modelling. Oxidized (up to 1.5 μm) and bare Si membranes with thicknesses from 7.7 to 50 μm were studied under pressure in the [0–1] bar range. We observed that the membrane stiffness is affected by the oxide depending on SiO 2 /Si thickness ratio. Finally, F.E.M. results are in good agreement for various membrane geometries, and the interest of this tool for the design of packaging structures is shown.

Details

Language :
English
ISSN :
09244247 and 18733069
Database :
OpenAIRE
Journal :
Sensors and Actuators A: Physical, Sensors and Actuators A: Physical, Elsevier, 1999, 74 (1-3), pp.174-177. ⟨10.1016/S0924-4247(98)00312-4⟩
Accession number :
edsair.doi.dedup.....9811bb9dad4a123d0dc8ca43c7bbf6b3