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On the origin of threading dislocations during epitaxial growth of III-Sb on Si(001): A comprehensive transmission electron tomography and microscopy study
- Source :
- Acta Materialia, Acta Materialia, Elsevier, 2018, 143, pp.121-129. ⟨10.1016/j.actamat.2017.09.055⟩
- Publication Year :
- 2018
- Publisher :
- HAL CCSD, 2018.
-
Abstract
- Electron tomography and complementary (scanning) transmission electron microscopy (STEM) are applied to investigate the origin of threading dislocations in the large lattice misfit, heteroepitaxial system of III-Sb on vicinal Si(001). Buried AlSb islands of the initial wetting layer are revealed at the interface toward the substrate in the three-dimensionally reconstructed data. Locations of island coalescence are retrieved from the tomogram. Complementary (S)TEM measurements reveal the location of threading dislocations and the presence of antiphase boundaries at the same specimen area. The number density of threading dislocations emanating from the interface and their distribution are unexpected. It is shown that the presence of threading dislocations is not simply correlated to sites of AlSb-islands coalescence or to the film closure during the transition from a 3D to a 2D growth. Moreover, an interaction with antiphase boundaries is suggested by the presented observations. Consequently, the contemporary notion of threading dislocation formation is refined and, eventually, it is suggested that measures to avoid antiphase domains and such to reduce threading dislocations have to be balanced for future strategies to epitaxially grow sphalerite structure III-V semiconductors on Si or Ge.
- Subjects :
- 010302 applied physics
Coalescence (physics)
[PHYS]Physics [physics]
Materials science
Polymers and Plastics
Condensed matter physics
Metals and Alloys
02 engineering and technology
021001 nanoscience & nanotechnology
Epitaxy
01 natural sciences
Electronic, Optical and Magnetic Materials
[SPI.MAT]Engineering Sciences [physics]/Materials
Crystallography
[SPI]Engineering Sciences [physics]
Electron tomography
Transmission electron microscopy
0103 physical sciences
Microscopy
Ceramics and Composites
Partial dislocations
0210 nano-technology
Vicinal
ComputingMilieux_MISCELLANEOUS
Wetting layer
Subjects
Details
- Language :
- English
- ISSN :
- 13596454
- Database :
- OpenAIRE
- Journal :
- Acta Materialia, Acta Materialia, Elsevier, 2018, 143, pp.121-129. ⟨10.1016/j.actamat.2017.09.055⟩
- Accession number :
- edsair.doi.dedup.....97a00102f7feba9810df45179524db37