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Micron-precision in cleaving glass using ultrafast bessel beams with engineered transverse beam shapes

Authors :
R. Giust
Pierre-Ambroise Lacourt
Remi Meyer
John M. Dudley
François Courvoisier
Jassem Safioui
Luca Furfaro
Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST)
Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC)
Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
Source :
Scopus-Elsevier, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, Jun 2017, Munich, Germany

Abstract

International audience; Ultrafast lasers in association to beam shaping have shown to be excellent candidates for transparent material processing. Non-diffractive solutions such as Bessel beams allows for precise energy deposition since they are robust to undesired non-linear effects and as they do not distort along the propagation. This offers important opportunities in laser-assisted cleaving, i.e. mechanical medium separation after single-pass laser illumination. Here we break the Bessel beam cylindrical symmetry using a novel anisotropic and non-diffractive solutions to investigate both lateral intensity contributions on material response and induced processing effect for non-cylindrical defects. Using such beam shape, we report a strong cleavability enhancement as well as an improvement of the final robustness of the separated glass in comparison with Bessel beams. We demonstrate cleaving for laser-writing speed as high as 25mm/s with ~1μm accuracy over the whole 20mm sample length.

Details

Database :
OpenAIRE
Journal :
Scopus-Elsevier, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, Jun 2017, Munich, Germany
Accession number :
edsair.doi.dedup.....96060c35e697aa789dd94aece76276f3