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Micron-precision in cleaving glass using ultrafast bessel beams with engineered transverse beam shapes
- Source :
- Scopus-Elsevier, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, Jun 2017, Munich, Germany
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Abstract
- International audience; Ultrafast lasers in association to beam shaping have shown to be excellent candidates for transparent material processing. Non-diffractive solutions such as Bessel beams allows for precise energy deposition since they are robust to undesired non-linear effects and as they do not distort along the propagation. This offers important opportunities in laser-assisted cleaving, i.e. mechanical medium separation after single-pass laser illumination. Here we break the Bessel beam cylindrical symmetry using a novel anisotropic and non-diffractive solutions to investigate both lateral intensity contributions on material response and induced processing effect for non-cylindrical defects. Using such beam shape, we report a strong cleavability enhancement as well as an improvement of the final robustness of the separated glass in comparison with Bessel beams. We demonstrate cleaving for laser-writing speed as high as 25mm/s with ~1μm accuracy over the whole 20mm sample length.
- Subjects :
- [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Materials science
business.industry
Scanning electron microscope
02 engineering and technology
021001 nanoscience & nanotechnology
Laser
Finite element method
law.invention
symbols.namesake
020303 mechanical engineering & transports
Optics
0203 mechanical engineering
law
symbols
Bessel beam
Laser beam quality
0210 nano-technology
business
Anisotropy
Ultrashort pulse
Bessel function
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Scopus-Elsevier, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, Jun 2017, Munich, Germany
- Accession number :
- edsair.doi.dedup.....96060c35e697aa789dd94aece76276f3