Anomalous low-temperature dopant diffusivity and defect structure in Sb- and Sb/B-implanted annealed silicon samples

Authors :: J. L. Allain
J. R. Regnard
Alberto Carnera
C. Brizard
Antonio Drigo
Aldo Armigliato
Filippo Romanato
Source :: Physical review. B, Condensed matter. 52(3)
Publication Year :: 1995

Subjects :: dopant diffusivity
Materials science
Silicon
chemistry
Dopant
Lattice defects
Analytical chemistry
chemistry.chemical_element
lattice defects
Microstructure
Thermal diffusivity

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