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Strategies to obtain pattern fidelity in nanowire growth from large-area surfaces patterned using nanoimprint lithography
- Source :
- Nano Research, Nano Research; 9(10), pp 2852-2861 (2016)
- Publication Year :
- 2016
-
Abstract
- Position controlled nanowire growth is important for nanowire-based optoelectronic components which rely on light emission or light absorption. For solar energy harvesting applications, dense arrays of nanowires are needed; however, a major obstacle to obtaining dense nanowire arrays is seed particle displacement and coalescing during the annealing stage prior to nanowire growth. Here, we explore three different strategies to improve pattern preservation of large-area catalyst particle arrays defined by nanoimprint lithography for nanowire growth. First, we see that heat treating the growth substrate prior to nanoimprint lithography improves pattern preservation. Second, we explore the possibility of improving pattern preservation by fixing the seed particles in place prior to annealing by modifying the growth procedure. And third, we show that a SiNx growth mask can fully prevent seed particle displacement. We show how these strategies allow us to greatly improve the pattern fidelity of grown InP nanowire arrays with dimensions suitable for solar cell applications, ultimately achieving 100% pattern preservation over the sampled area. The generic nature of these strategies is supported through the synthesis of GaAs and GaP nanowires. [Figure not available: see fulltext.] (Less)
- Subjects :
- Materials science
Other Physics Topics
Annealing (metallurgy)
Nanowire
Nanotechnology
02 engineering and technology
010402 general chemistry
7. Clean energy
01 natural sciences
Nanoimprint lithography
law.invention
law
Solar cell
nanoimprint lithography
General Materials Science
metal–organic vapor phase epitaxial (MOVPE)
Electrical and Electronic Engineering
patterning
business.industry
Particle displacement
semiconductor
021001 nanoscience & nanotechnology
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
0104 chemical sciences
Solar energy harvesting
Semiconductor
nanowire
Nano Technology
Light emission
0210 nano-technology
business
Subjects
Details
- ISSN :
- 19980124
- Database :
- OpenAIRE
- Journal :
- Nano Research
- Accession number :
- edsair.doi.dedup.....93b17d665865b5586a118a00ee5cbd11
- Full Text :
- https://doi.org/10.1007/s12274-016-1165-z