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Optimization of the Anodization Processing for Aluminum Oxide Gate Dielectrics in ZnO Thin Film Transistors by Multivariate Analysis
- Source :
- ACS combinatorial science. 21(5)
- Publication Year :
- 2019
-
Abstract
- The present study reports a two-level multivariate analysis to optimize the production of anodized aluminum oxide (Al2O3) dielectric films for zinc oxide thin-film transistors (TFTs). Fourteen perf...
- Subjects :
- Transistors, Electronic
Oxide
chemistry.chemical_element
Zinc
Dielectric
010402 general chemistry
01 natural sciences
law.invention
chemistry.chemical_compound
law
Aluminum Oxide
Combinatorial Chemistry Techniques
Electrodes
Aluminum oxide
010405 organic chemistry
Anodizing
Chemistry
business.industry
Transistor
General Chemistry
General Medicine
Electrochemical Techniques
0104 chemical sciences
Thin-film transistor
Multivariate Analysis
Optoelectronics
Zinc Oxide
business
Subjects
Details
- ISSN :
- 21568944
- Volume :
- 21
- Issue :
- 5
- Database :
- OpenAIRE
- Journal :
- ACS combinatorial science
- Accession number :
- edsair.doi.dedup.....912b56207289c35e7e7adf82a8c319d6