Radio frequency magnetron sputtering deposition of hetero-epitaxial strontium barium niobate thin films (SrxBa1-xNb2O6)

Authors :: M. Cuniot-Ponsard
J. M. Desvignes
Eric Leroy
B. Ea-Kim
Laboratoire Charles Fabry de l'Institut d'Optique / Manolia
Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO)
Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)
Chimie métallurgique des terres rares (CMTR)
Centre National de la Recherche Scientifique (CNRS)
Source :: Journal of Applied Physics, Journal of Applied Physics, American Institute of Physics, 2003, 93 (3), pp.1718-1724. ⟨10.1063/1.1535749⟩
Publication Year :: 2003
Publisher :: HAL CCSD, 2003.
Abstract: International audience; Excellent electro-optic properties of SrxBa1−xNb2O6 crystals (SBN:x) motivate the attempts to control the deposition of high ordered SBN thin films with the aim of optical waveguiding and processing integration. We have examined the ability of sputtering techniques to deposit stoichiometric SBN thin films. Composition analysis has enabled us to probe the mechanisms which control the target-film composition transfer and to define an experimental strategy for stoichiometry control. Epitaxial (001) SBN thin films have been obtained on MgO (100) substrates, which exhibit two in-plane orientations (±31°) mirror symmetric to the MgO cell axis.

Language :: Spanish; Castilian
ISSN :: 00218979 and 10897550
Database :: OpenAIRE
Journal :: Journal of Applied Physics, Journal of Applied Physics, American Institute of Physics, 2003, 93 (3), pp.1718-1724. ⟨10.1063/1.1535749⟩
Accession number :: edsair.doi.dedup.....90e767280cfc8b743a32d1ae2174ea55

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