Optimal design and nonlinearities in a z-axis resonant accelerometer

Authors :: Valentina Zega
Sarah Zerbini
Alberto Corigliano
Claudia Comi
Source :: 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.
Publication Year :: 2015
Publisher :: IEEE, 2015.
Abstract: Micro-Electro-Mechanical Systems (MEMS) accelerometers are micro-sized devices largely used for detecting accelerations in the consumer and automotive market. Both capacitive and resonant sensing have been successfully employed in these devices.

Subjects :: Microelectromechanical systems
Optimal design
Engineering
Hardware_GENERAL
law
business.industry
Capacitive sensing
Electrical engineering
Cartesian coordinate system
Automotive market
Accelerometer
business
law.invention

Database :: OpenAIRE
Journal :: 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
Accession number :: edsair.doi.dedup.....9076f4606f17fd7795c85f1d6df33556

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