Determination of the microbeam profile using deconvolution procedures

The application of deconvolution procedures (Fourier deconvolution, iterative least-squares, maximum entropy) for the determination of a two-dimensional profile of a proton microprobe is described. It is found that the maximum-entropy method is the best suited deconvolution procedure for the restoration of the microprobe profile. The use of the method is feasible event for data with 40% uncertainty. Differences of the microprobe profiles calculated on the basis of X-ray and secondary electron distributions, are observed. The explanation of the phenomenon is proposed.